SEM cross-sectional image of C4 bump prepared at 6 keV, in 3 hours using Gatan Ilion+
Planar Surface Preparation for SEM Cross-Section Viewing
Gatan, Inc. is pleased to introduce the Ilion+, a significant advance in the preparation of large planar cross sections for microscopic imaging and microanalysis. The Ilion+ is a dedicated, ion beam based system for the preparation of large area planar cross sections from challenging SEM samples.
The Ilion+ uses a proprietary milling system that exposes significantly greater areas than traditional FIB milling while encompassing a wider range of delicate samples not compatible with mechanical polishing and other techniques. The system is easy to install and operate allowing users to begin making samples quickly. The Ilion+ design is based on the proven Gatan PIPS (Precision Ion Polishing System).
"Our beta results for the Ilion+ confirm our economic model predictions of a threefold reduction in cost per sample when compared to FIB," reports Kevin Scudder, General Manager, Gatan, Inc.
For over 45 years, Gatan, Inc. has designed and manufactured instruments and products for electron microscopes that enable and advance EM applications. Gatan is the recognized leader in the industry and our products set the industry standards. Gatan is committed to being a quality provider of high performance instrumentation for imaging and analysis in TEM and SEM applications. Our designers and engineers understand the application criteria of our customers and provide them with the best solutions for their application needs.
Gatan, Inc. 5794 W. Las Positas Blvd. Pleasanton, CA 94588 USA
Tel: +1.925.463.0200 Fax: +1.925.463.0204 Contact: info@gatan.com Website: www.gatan.com
