ChemiSTEM technology enables Tecnai Osiris to achieve a factor of 50 or more enhancement in speed of energy dispersive X-ray (EDX) elemental mapping
FEI Company will showcase the Tecnai Osiris scanning/transmission electron microscope (S/TEM) at booth 1048 during M&M 2010 in Portland, Oregon, USA. The Tecnai Osiris combines analytical throughput with ease-of-use to meet the requirements for both high-volume industrial and multi-user research laboratories.
The patent-pending ChemiSTEM technology enables the Tecnai Osiris to achieve a factor of 50 or more enhancement in speed of energy dispersive X-ray (EDX) elemental mapping by combining technical advances in beam generation with disruptive changes in EDX signal detection. The Tecnai Osiris is built on a platform designed to maximize productivity and return on investment in high-volume analysis.
Tony Edwards, FEI’s senior vice president of market divisions, explaines, “The Tecnai Osiris addresses the needs of both our research and industrial customers who place increasing importance on elemental composition analysis and mapping of all samples, but until now, could not find an S/TEM with the required analytical speed and ease-of-use to support this requirement. For example, the continuing decrease in device sizes and proliferation of new materials in semiconductor manufacturing, and the appearance of more samples with unknown composition in multi-user research facilities drives the need for an S/TEM providing the ease-of-use of EDX analytics with an elemental mapping speed comparable to STEM imaging.”
Edwards continued, “The Tecnai Osiris was designed to fill this current gap in the market by providing elemental mapping with large fields-of-view in minutes instead of hours, and without the need for an operator highly trained in complex analytics. This ease-of-use is further extended by the new SmartCam remote control interface, which enables experts to provide remote guidance in multi-user or industrial facilities to less experienced operators.”
Contact: FEI Company
www.fei.com.
