Volume 24 Issue 7 November 2010

Volume 24 Issue 7 November 2010

Articles

Schlossmacher_Fig7_thm.jpg

Nanoscale Chemical Compositional Analysis with an Innovative S/TEM-EDX System

Peter Schlossmacher, Dmitri O. Klenov, Bert Freitag, Sebastian von Harrach and Andy Steinbach
FEI Company, Eindhoven, The Netherlands
A new technology for energy dispersive X-ray spectroscopy in the scanning/transmission electron microscope is described that allows orders-of-magnitude improvement in key analytical metrics, such as sensitivity and time-to-data. This technology incorporates a four SDD detector system highly optimized for light element detection, collection efficiency, and improved tilt response. We believe this new technology will enable the S/TEM to answer many scientific and engineering questions that were previously out of reach and will lead to a renaissance of interest in using EDX as a prime tool in S/TEM microscopy and analytics. Here we describe the characteristics of the new EDX technology and illustrate its performance for the chemical analysis of several application challenges each requiring sensitivity and speed previously unattainable.
Kohno_Figure8_thm.jpg

Development of a Cold Field-Emission Gun for a 200 kV Atomic Resolution Electron Microscope

Yuji Kohno,1 Eiji Okunishi,1 Takeshi Tomita,1 Isamu Ishikawa,1 Toshikatsu Kaneyama,1 Yoshihiro Ohkura,1 Yukihito Kondo1 and Thomas Isabell 2.
1. JEOL Ltd., Akishima, Tokyo, Japan. 2. JEOL USA Inc., Peabody, Boston, MA, USA.
We have developed a new type of cold field-emission electron gun (CFEG) for a 200 kV scanning transmission electron microscope, the JEM-ARM200F. This CFEG provides a newly developed vacuum system which can evacuate the area around the tip to the order of 10-9 Pa resulting in good stability of emission. The CFEG is thus able to produce high brightness, a small energy spread and stable emission all at the same time. The low chromatic aberration from the small energy spread (0.32 eV FWHM) improves the resolution of Cs-corrected STEM. Additionally, the small probe with its high current and small energy spread enables high-speed acquisition and high spatial and energy resolution in electron energy-loss spectroscopy. In this article we describe the design of the new CFEG and demonstrate that at 200 kV the 63 pm dumbbell of GaN (211) can be resolved and that EELS analysis with a resolution of better than 0.3 eV reveals the fine structure of the titanium L2,3 edge.

Magdaluyo_Figure2_thm.jpg

Mesostructure and Adsorption Isotherm of Hybrid Organosilica Molecular Sieve

Eduardo R. Magdaluyo, Jr., 1 Raymond V. Rivera Virtudazo 2 and Emily V. Castriciones3
1. Department of Mining, Metallurgical and Materials Engineering, College of Engineering, University of the Philippines, Quezon City, Philippines. 2. Ceramic Engineering Department, Mariano Marcos State University, Batac, Ilocos Norte, Philippines. 3. Inorganic Synthesis and Computational Research Lab, Institute of Chemistry College of Science, University of the Philippines, Quezon City, Philippines
The mesostructure and surface properties of biphenyl-functionalized organosilica molecular sieves were investigated. The hybrid xerogel material was prepared using a sol-gel route involving the co-condensation of 4,4’-bis(triethoxysilyl)biphenyl and 1,2-bis (triethoxysilyl)ethane. Transmission electron microscopy images revealed lattice fringes along and perpendicular to the pore axis and hexagonal array of mesopores. The surface area ranged from 1196.99 to 1578.57 m2 g-1 and total pore volume from 1.2 to 0.75 cm3 g-1. No significant change was observed on the pore diameter as a function of surfactant concentration ratio and aging time.

Orion_Fig8_thm.jpg

Helium Ion Beam Processing for Nanofabrication and Beam-Induced Chemistry

Paul Alkemade,1 Vadim Sidorkin,1 Ping Chen,1 Emile van der Drift,1 Anja van Langen,1 Diederik Maas,2 Emile van Veldhoven,2 and Larry Scipioni 3 1. Kavli Institute of Nanoscience, Delft University of Technology, Delft, The Netherlands. 2. TNO Science and Industry, Delft, The Netherlands. 3. Carl Zeiss NTS, Peabody, MA, USA.
The helium ion microscope (HIM) opens a new frontier in microscopy. Even more, the atomic-size ion source of the HIM hints at nanofabrication on the atomic scale. Recent experiments of helium ion beam lithography and helium ion beam induced deposition have indeed shown that nanofabrication with helium ions is feasible. Moreover, in some important aspects, such as spatial resolution and achievable pattern densities, the focused helium beam surpasses the established nanofabrication techniques. In this article we discuss two examples where the helium ion microscope shows the ability to write small, dense patterns that will be enablers for advanced nanofabrication applications, using direct-write lithography and beam-induced chemistry.
Volume number: 
2010
Issue number: 
7

M&A Print Magazine: Current Issue

March 2012 Contents of the Current Issue of
Microscopy and Analysis


Volume 26, Issue 2 (March 2012)

Click on the images for larger versions of the March issue's cover pictures and stories for the Americas/Asia Pacific/Euro/UK editions and the Tomography Supplement.